New Techniques Move InSitu Particle Monitoring Closer to the Wafer (1.7 MB)

This paper was written to outline the communication requirements as applied to a CLS-700T particle counter and LiQuilaz particle counter combination. Both particle counters must be communicated separately via different network addresses. The CLS-700 particle counter employs hardware lines to control when the LiQuilaz particle counter is actively sampling. Only the CLS-700T particle counter command/response sequence pairs are described in detail.