CLS 700 T Liquid Particle Counter (Press Release)

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Corrosive Liquid Particle Counter with Remote Triggering for Process Tools and Baths

For Immediate Release
Contact: Nina Akindele
(303) 443-7100

Particle Measuring Systems presents the CLS-700 T for sampling and integrated particle counting of hot corrosive chemicals for insitu process control monitoring (ISPM). This sampler extracts fluid from a bath or process location and compresses it to remove unwanted bubbles that can cause inaccuracies during particle measurements.

The addition of remote triggering to the CLS-700 T provides increased security and better integration in process tools and baths. The CLS-700 T can be automatically started or stopped during a specific tool operation or maintenance cycle. Remote shutdown prevents the injection of damaging chemical foam and air into the particle counter thereby increasing reliability and uptime. Safety features include the purging of dangerous chemicals from the sampler on shutdown.

Particle measurements are performed using the LiQuilaz® particle sensor. Up to 15 adjustable sizing thresholds are available starting as low as 0.2 microns.

The polypropylene housing now meets the FM4910 flame retardant standard. The CLS-700 T’s robust housing is resistant to surface damage and is easy to maintain and clean with harsh solvents. The CLS-700 T can be integrated into a process or located on a laboratory cart for mobile sampling of chemical baths and drums. Particle Measuring Systems is the industry leader in microcontamination monitoring. PMS combines high-performance instrumentation with unrivaled application expertise to solve the problems of semiconductor, disk drive and pharmaceutical manufacturers, and general cleanroom applications.