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Point-of-Use Ion Mobility Spectrometer: AirSentry® II
The AirSentry II is the winner of the 2008 Editors' Choice Best Product Awards , annually awarded by Semiconductor International.
Particle Measuring Systems' newest Airborne Molecular Contamination (AMC) monitor, the AirSentry® II, was designed with performance in mind. The new Ion Mobility Spectrometry (IMS) cell provides ppt sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis.
**Contact us for a quote or more information.**
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Download the Click here to signup and download files (AirSentry II AMC Monitoring System Spec Sheet) spec sheet...
Download the Click here to signup and download files (AirSentry II Chlorides) spec sheet...
Download the Click here to signup and download files (AirSentry II) spec sheet...
BENEFITS
- Continuous monitoring of a critical point-of-use location
- Single external Calibration Station ensures analyzer to analyzer matching
- Robust and reliable data acquisition, control, and analysis
- No moving parts
- Infrequent maintenance
APPLICATIONS
- Exposure optics - hazing and lens warranty data
- Reticle stage - reticle hazing
- Resist track - dispense/develop contamination (t-topping)
- Reticle inspection tool and stockers - storage contamination
- Ambient cleanroom monitoring - baseline contamination
- Make-up and recirculated air analysis - contamination
Contact us if you need more information or have questions.
Learn more about our microcontamination monitoring services.
AirSentry® is a registered trademark of Particle Measuring Systems.
Information on this website is subject to change without notice.
