Liquistat Liquid Particle Counter

Download the Click here to signup and download files (Liquistat Particle Counter) spec sheet...

AVANTAGES

• Counts more particles per unit time than any other liquid particle counter
• Greater particle count accuracy obtained with volumetric measurements
• Quicker process qualification with high flow rates and 100% view volume
• Lower sample variation with high precision measurements
• Less scrap: shorter sampling intervals allow quick reaction to process chemicals
• High sensitivity provided by "Inviscid Jet" technology
• Particle data collection and analysis simplified with optional Facility Net software
• Utilize existing Ethernet network to connect to Facility Net process monitoring software
• Simple connection to SCADA and PLCs with 4-20 mA communication
• Simplified installation with bench top or wall mounting brackets
• Powerful Facility Net software provides alphanumeric paging, data archival and retrieval, time plots and SPC charts
• Internal leak detector provides an extra margin of safety and chemically resistant Polypropylene exterior allows unit to be used safely with most chemicals
• Easy to use and safe

APPLICATIONS

• In-line liquid particle monitoring of wet benches
• Wet bench qualifying
• Chemical manufacturing and distribution system particle monitoring
• Chemical filter particle testing
• Rinse bath particle monitoring
• Wet etch process particle monitoring

Contact us if you need more information or have questions.

Learn more about our microcontamination monitoring services.

Liquid Particle Counter: The Liquistat is an in-line particle monitor used in the manufacturing and delivery of corrosive process chemicals and DI water. This volumetric liquid particle sensor samples 100% of the sample volume with a flow rate of 50 ml/min. The Liquistat counts more particles in process chemicals per unit time than any other liquid particle counter. Volumetric sampling provides higher precision results even with shorter sampling intervals. Shorter sampling intervals allows more rapid notification in the event of an excursion and tighter process control. The combination of a large sample volume of 0.1 micron sensitivity allows the Liquistat to effectively measure the cleanest liquids.

The Particle Measuring Systems patented "Inviscid Jet" technology is a unique optical design which provides superior sensitivity of 0.1 microns in most process chemicals including hydrofluoric acid. One source of background noise in optical particle counters is the scattering of the laser light on the sample cell window. The Liquistat overcomes this limitation by injecting the sample into a windowless cavity and sampling particles only in this region.

The Liquistat liquid particle counter is made out of polypropylene and operates at 24 volts, which eliminates the need for running conduit when installing the unit.There are status indicators on the front of the sensor indicating power and activity.There is also a three channel 4-20mA output connection for two channels of particle counts and one for instrument status.

Data is collected by the Liquistat liquid particle counter in five size ranges, with the first channel adjustable from 0.1 to 0.15 microns. An Ethernet connection is provided to connect the Liquistat to Facility Net, a powerful facility monitoring package which enables an operator to collect, track and report data from a variety of particle monitoring instrumentation. Real-time and retrieved data are available in many different formats including time plots, histograms, tabular display and SPC charts.

Liquistat® is a registered trademark of Particle Measuring Systems, Inc.
Patents and applications apply - US 4798465; Japan 2786187; Germany 3712665C2; US 5861950; Japan 3335645; Germany 69801825.7-08

This liquid particle counter is CE certified.