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CLS-700 T Contador de Partículas em Líquidos corrosivos
A compression sampler combined with a LiQuilaz s-series volumetric particle counter for measuring most liquid chemicals up to 150°C. Designed for versatility and reliability, the system can be integrated into a wet bench for continuous particle monitoring or located on a cart for increased mobility when sampling from process to process. The compression sampler eliminates erratic data problems due to bubbles found in effervescent and hot corrosive chemicals.
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New Techniques Move InSitu Particle Monitoring Closer to the Wafer (1.7 MB)
Vantagens
- Cost Reduction
- 50 or 80 mL/min. flow rate and 100% view volume means quicker process qualification
- Real-time characterization and analysis for immediate response to anomalies means less waste
- Versatility
- Supports a wide range of applications and fluids
- Programmable particle-size thresholds
- Designed for easy mobility
- Compression sampling allows instrument to measure most chemicals, including effervescent ones
- External trigger coordinates sampling with process events
- Measurements can be made directly out of the bath
- Ease of Use
- Facility Net process control software simplifies online sampling by providing alphanumeric paging, sensor status, tabular and SPC charts, and time plots
- SamplerSight batch sampling software facilitates all aspects of data management, including sophisticated data storage, retrieval, and report generation
- Designed for quick cleanup when switching from one liquid to another
Aplicações
- Particle level measurement in effervescent liquids
- Chemical quality assurance
- Wet process monitoring
- Chemical process control
- Bath monitoring
A Particle Counting Challenge: Optimising the Performance of Liquid Compression Samplers (360.0 KB)
Liquid Particle Counter: The liquid corrosive sampler, Model CLS-700, is a batch system used to sample process chemicals at temperatures up to 150°C. The system is designed to be versatile and fits on a laboratory cart for sampling chemicals from bath to bath within a fabrication facility. The CLS-700 extracts the fluid from a bath, drum or bottle, forces it through a sensor and collects the particulate information. Sampling is performed by drawing the liquid into the buret and compressing the fluid to remove any bubbles. The wetted surfaces in the CLS-700 are chemically compatible with most hot process chemicals including hydrofluoric acid. All the electronics are physically separated from the plumbing section and purged with an inert gas to prevent corrosion. Purge gas can be provided from a house supply, bottle or pump.
The CLS 700 T liquid particle counter includes triggering which allows the sampler to be started or stopped by a process tool. The sampler can be automatically shut off during a bath change preventing the injection of damaging chemical foam and air into the particle counter.
Particulate measurements are performed using the LiQuilaz® particle sensor. Up to 15 sizing thresholds are available starting at 0.2 microns. Sizing sensitivity is operator adjustable and controlled through the software. A personal computer is used to display the particle data in real time representing counts per unit volume in a time series plot, raw or normalized counts in a tabular format, and percent of total in a histogram.
The external surface of the CLS-700 is made out of polypropylene with all reference and status labeling laser etched. This allows for easy maintenance for wiping down between chemical sampling without damaging the surface with harsh solvents.
This particle counter is CE certified.
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