Process Characterization

With a full range of on-site testing capabilities, our experts can come to your facility to characterize the particle and molecular contamination levels in a variety of processes or clean areas. For help in solving a specific contamination problem, call us right away to develop a fast-response plan to troubleshoot and identify the problem as quickly as possible.

On-Site Testing Capabilities

• Cleanroom air
• Ultra pure water (UPW) systems
• Chemical delivery systems
• Wet benches
• Airborne or liquid borne particles; or chemical filters
• Process gases and CDA lines
• Minienvironments and process tools

Troubleshooting

When contamination problems occur, our experts can provide the information needed to solve them quickly.

• Identify sources of contamination
• Quantify levels by location or process
• Fast and thorough reporting and analysis

See above file download for full tables and figures. Reproduction or translation of any part of this work without the permission of the copyright owner is unlawful. Requests for permission or further information should be addressed to Particle Measuring Systems, Inc. at 1-800-238-1801.

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