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DI Water / UPW Particle Monitoring











Papers

 

Click here to signup and download files (Particle Counting Statistics in DI Water)

There are three major determinates of the statistical performance of a DI water particle counter. Read this paper to learn more about understanding the data when monitoring particles in DI water...

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Click here to signup and download files (New Particle Monitoring Strategies for DI Water in 300 mm Fabs)

This paper examines the opportunities in DI water particle monitoring to improve performance, track data trends, and reduce cost by using a combination of high sensitivity particle counters and less expensive, lower sensitivity (0.1 microns) particle counters with very high sample volumes. We detail the impact of size sensitivity, sample volume, and zero count level on DI water particle counter performance. Practical monitoring considerations and particle distribution differences between poorly filtered and highly filtered DI water systems are also covered.

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Click here to signup and download files (Particle Counters for DI Water Systems)

Find the right particle counter for your DI water system.

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Products

  DataAnalyst Software

Liquid Particle Counter:
HSLIS M50e

This liquid particle counter provides continuous real-time particle monitoring

Sensitivity

  • 0.05 µm
  • 0.06 µm
  • 0.1 µm

Sample Volume

  • 0.25 mL/min.
  • 0.6 mL/min.
  • 3 mL/min.

Zero Count

  • < 1000 cts/L
  • < 2000 cts/L
  • < 1000 cts/L
  Liquistat Liquid Optical Particle Counter for DI water and chemical applications

Liquid Particle Counter: Liquistat®

A volumetric particle counter using patented "Inviscid Jet" technology for DI water and chemical particle counting applications.

Sensitivity

  • 0.1 µm

Sample Volume

  • 50 mL/min

Zero Count

  • < 20 cts/L
  DI water particle counter: Ultra DI 50

Laser Particle Counter:
Ultra DI®

This particle counter has a large sample volume, low zero count, and high counting efficiency

Sensitivity

  • 0.05 µm

Sample Volume

  • 3.75 mL/min

Zero Count

  • < 50 cts/L

Services

Particle Counter Rental / Leasing Options

If you need a particle counter or molecular contamination monitor for a short-term project or troubleshooting, we offer a comprehensive rental program.

Particle and Molecular Contamination Training Services

Process Characterization

Without Measurement There Is No Control
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