PRODUCTSSERVICESKNOWLEDGE CENTERCUSTOMER SUPPORTOUR COMPANY

ITRS Roadmap Solutions


As the leader in particle and molecular contamination monitoring, we have the products to help you meet the latest ITRS Roadmap requirements.

Download our papers to further educate you on contamination monitoring, or learn about contamination monitors.

Contact us if you need more information or have questions.

Papers

 

Click here to signup and download files (Optimized Molecular Contamination Monitoring for Lithography)

Recent technical advances have made it feasible to perform continuous real-time monitoring with significant advances in sensitivity and stability while minimizing sample tubing effects. These improvements are realized by using...

Download above file for full tables and figures, or for overview, see HTML Version.


N
E
W

Click here to signup and download files (Particle Monitoring in Ultra Pure Water for Microelectronic Applications)

View this presentation to learn why particle monitoring is critical, how to choose a particle counter, and how to interpret the data provided by the particle counter.


 

Click here to signup and download files (AMC Monitoring with IMS)

Learn about the Ion Mobility Spectroscopy (IMS)technology for Airborne Molecular Contamination (AMC) monitoring.


Products

  DI water particle counter: Ultra DI 50

Laser Particle Counter:
Ultra DI®

This particle counter has a large sample volume, low zero count, and high counting efficiency

Sensitivity

  • 0.05 µm

Sample Volume

  • 3.75 mL/min

Zero Count

  • < 50 cts/L
N
E
W
Molecular Contamination Monitor: AirSentry II

Point-of-Use Ion Mobility Spectrometer: AirSentry® II

  • Continuous monitoring of a critical point-of-use location
  • Small footprint, stackable design
  • 0-50 ppb dynamic range
Without Measurement There Is No Control
Privacy content Copyright © 2002-2012 • Particle Measuring Systems, Inc.

Information on this website is subject to change without notice.