As feature sizes have gotten smaller and wafers have gotten bigger, the risk associated with contamination has grown accordingly. It is no longer sufficient to do occasional spot checks on the air, gas, or liquids that touch your product or affect your process tools. Process monitoring with real-time contamination data can prevent significant product loss, improve process tool performance, demonstrate compliance with warranty conditions, and provide additional insight into the process itself. Particle Measuring Systems has products for specifically designed to help you control your process by providing real-time information on both molecular and particulate contamination.
Contact us if you need more information or have questions.
Molecular Contamination Monitoring
Molecular contamination causes problems to production processes, product material, equipment surfaces, and in serious cases, even human health.
Particle Measuring Systems offers instruments and services which identifies contamination before it can cause significant damage. With ppt detection, real-time sampling, NIST traceable calibrations, and various data analysis packages, customers can monitor in confidence. We have many years experience in molecular contamination monitoring, and this experience provides you with superior products, applications knowledge, and services options.
To learn more read Monitoring Airborne Molecular Contamination: a Quantitative and Qualitative Comparison of Real-time and Grab-sampling Techniques.
Liquid Particle Counting
To save your product from costly damage, it is imperative to be able to rely on the cleanliness levels of the chemicals used.
The CLS 700T and the HSLIS M65 UL1604 provide necessary particle counting for liquid chemicals.
Read one of our papers to learn more about monitoring particles in liquid chemicals:
Particle Counting in Air
Minienvironments have certain distinctive characteristics that require special monitoring techniques and equipment.
Based on our years of industry leadership in microcontamination management, we have developed the MiniNet, an entirely new type of process monitor explicitly for monitoring minienvironments. The MiniNet process monitor is designed to help the tool owner detect and diagnose conditions in which yield might be impacted by particles.
Learn more by reading Particle Monitoring in Minienvironments.
Information on this website is subject to change without notice.
