More Information

Optical Haze Blurs the Bottom Line

Detect Contamination Before It Damages Your Lens

Transmission loss, image distortion, decreased throughput, and costly maintenance all result from the preventable condition of optical hazing. In order to prevent this from occurring, the first step is to detect and monitor the contaminants that cause these effects. Real-time analyzers monitor for acids, bases, and condensable organics in a single system at detection levels below 193 nm lithography requirements.

See below for papers and products to help you avoid optical hazing.

Papers

AMC Monitoring with IMS (1.5 MB)

Learn about the Ion Mobility Spectroscopy (IMS)technology for Airborne Molecular Contamination (AMC) monitoring.

Ion Mobility Spectrometry (IMS) Theory and Applications (866.6 KB)

Ion Mobility Spectroscopy (IMS) has gained widespread acceptance in many applications for detecting and identifying contaminant molecules. This paper will investigate how this technology works, look at the various industries that use IMS monitors, and discuss monitoring applications and examples.

Download above file for full tables and figures, or for overview, see HTML Version.

Products

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Molecular Contamination Monitor: AirSentry II

Point-of-Use Ion Mobility Spectrometer: AirSentry® II

Continuous monitoring of a critical point-of-use location
Small footprint, stackable design
0-50 ppb dynamic range

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AirSentry® II Calibration Station

Generates accurate gas-phase calibration standards
Humidified span calibration simulate ambient environments
Minimal service requirements

Services

Particle Counter Rental / Leasing Options

If you need a particle counter or molecular contamination monitor for a short-term project or troubleshooting, we offer a comprehensive rental program.

Molecular Contamination

Without Measurement There Is No Control

Information on this website is subject to change without notice.