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WET PROCESS CONTROL

Monitoring particles in your wet bench saves you money. Extend maintenance intervals, improve yield, and lower costs using compression sampling that eliminates erratic data problems due to bubbles and provides real-time information on the condition of your web process.

For more information, please locate the product or application notes that interest you.

Papers

Click here to signup and download files (Which Particle Counter is Best for You? Measurement of DI Water and Fluids)

Compare particle counters and find the right one for your DI water application.

Download above file for full tables and figures, or for overview, see HTML Version.

Click here to signup and download files (New Techniques Move InSitu Particle Monitoring Closer to the Wafer)

This paper was written to outline the communication requirements as applied to a CLS-700T particle counter and LiQuilaz particle counter combination. Both particle counters must be communicated separately via different network addresses. The CLS-700 particle counter employs hardware lines to control when the LiQuilaz particle counter is actively sampling. Only the CLS-700T particle counter command/response sequence pairs are described in detail.

Products

CLS-700 T Chemical Particle Counter

This particle counter monitors most liquid chemicals up to 150°C. Continuous or mobile monitoring.

Sensitivity

0.2 µm
0.3 µm
0.5 µm

Sample Volume

50 mL/min
80 mL/min
80 mL/min

Zero Count

< 1 cts/mL
< 1 cts/mL
< 1 cts/mL

Liquid Particle Counter: LiQuilaz®

A particle counter that provides precision analysis for most process chemicals up to 150°C.

Sensitivity

0.2 µm
0.3 µm
0.5 µm
1.5 µm
2.0 µm

Sample Volume

50 mL/min
80 mL/min
80 mL/min
20 mL/min
70 mL/min

Zero Count

< 25 cts/L
< 15 cts/L
< 15 cts/L
< 50 cts/L
< 50 cts/L

N
E
W

Liquid Particle Counter: HSLIS M65 ANSI/ISA

This particle counter provides measurements
for solvents, chemicals, and DI water

Sensitivity

0.06 µm

Sample Volume

0.6 mL/min

Zero Count

< 2000 cts/L

CLS 1000 Chemical Particle Counter

A bubble compression particle counter that monitors liquid chemicals up to 90° C. Continuous or mobile monitoring.

Sensitivity

0.1 µm

Sample Volume

25 mL

Zero Count

< 100 cts/L

Liquistat Liquid Optical Particle Counter for DI water and chemical applications

Liquid Particle Counter: Liquistat®

A volumetric particle counter using patented "Inviscid Jet" technology for DI water and chemical particle counting applications.

Sensitivity

0.1 µm

Sample Volume

50 mL/min

Zero Count

< 20 cts/L

Laser Particle Counter:
Ultra DI®

This particle counter has a large sample volume, low zero count, and high counting efficiency

Sensitivity

0.05 µm

Sample Volume

3.75 mL/min

Zero Count

< 50 cts/L

SamplerSight Batch Sampling Software

Provides a comprehensive view of batch-based liquid particle counter information with histogram, time plot, and tabular data.

Facility Monitoring Software: Facilty Net

Provides a comprehensive view of the environmental and process monitoring conditions of a facility. Collect, display, analyze, store, and report data from particle counters.

Without Measurement There Is No Control

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