WET PROCESS CONTROL
Monitoring particles in your wet bench saves you money. Extend maintenance intervals, improve yield, and lower costs using compression sampling that eliminates erratic data problems due to bubbles and provides real-time information on the condition of your web process.
For more information, please locate the product or application notes that interest you.
Papers
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Continuous Particle Monitoring Of Buffered Oxide Etch Using the CLS-700T (577.2 KB) The CLS-700T particle counter is capable of qualifying the BOE etch tank more quickly and reliably than the previous method of using witness wafers. Additionally, other maintenance issues can be readily identified and corrected before production wafers are compromised. This saves wafers, and reduces the need for expensive rework. Download above file for full tables and figures, or for overview, see HTML Version. |
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New Techniques Move InSitu Particle Monitoring Closer to the Wafer (1.7 MB) This paper was written to outline the communication requirements as applied to a CLS-700T particle counter and LiQuilaz particle counter combination. Both particle counters must be communicated separately via different network addresses. The CLS-700 particle counter employs hardware lines to control when the LiQuilaz particle counter is actively sampling. Only the CLS-700T particle counter command/response sequence pairs are described in detail. |
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Which Particle Counter is Best for You? Measurement of DI Water and Fluids (712.5 KB) Compare particle counters and find the right one for your DI water application. Download above file for full tables and figures, or for overview, see HTML Version. |
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Basic Guide to Particle Counters and Particle Monitoring (441.3 KB) This overview of particle counting starts by discussing sources of particles and particle monitoring technologies available, and continues by discussing various particle counter... Download above file for full tables and figures, or for overview, see HTML Version. |
Products
The CLS-1000 chemical particle counter is a compression sampler combined with a Liquistat volumetric particle counter for measuring liquid chemicals up to 90 degrees C. Built-in safety features such as leak detection and purge air make it ideal for integration into a wet bench for use with dangerous solvents and acids. Designed for versatility and reliability, the system can be located on a cart for increased mobility when sampling from process to process. The compression sampler eliminates erratic data problems due to bubbles in effervescent or hot chemicals. The CLS-1000 liquid particle counter is fully compliant with the new SEMI C1 standard for particle measurement of process chemicals.
A compression sampler combined with a LiQuilaz® s-series volumetric liquid particle counter for measuring most liquid chemicals up to 150°C. Designed for versatility and reliability, the system can be integrated into a wet bench for continuous particle monitoring or located on a cart for increased mobility when sampling from process to process. The compression sampler eliminates erratic data problems due to bubbles found in effervescent and hot corrosive chemicals.
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HSLIS M65 and HSLIS M65 UL1604 liquid particle counters allow continuous, real-time monitoring of fluid particle contamination levels in Class I, Div II environments. Reduce costs with particle counters that can be installed without modification into these critical monitoring areas. Sizing sensitivity of 0.065 µm. Easily integrates into Facility Net software to provide an economical way to monitor multiple flow systems.
The Liquistat® liquid particle counter uses volumetric sampling for high precision particle analysis in DI water and chemical applications. The patented "Inviscid Jet" technology is a unique optical design providing superior sensitivity. The Liquistat Particle Counter eliminates background noise caused by the scattering of a laser light on a sample cell window by injecting the sample into a windowless cavity and sampling only in this region.
LiQuilaz® particle counters are volumetric monitors with a variety of sizing sensitivities as low as 0.2 microns. They provide high precision analysis for most process chemicals including hydrofluoric acid and hot, corrosive chemicals up to 150°C.
Volumetric liquid particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.
Ultra DI® liquid particle counters are designed specifically for (deionized) DI water systems and will count and size contaminants as small as 0.05 microns (50 nano). The Ultra DI's large sample volume, low zero count, and high counting efficiency provide unsurpassed performance.
Provides a comprehensive view of batch-based liquid particle counter information with histogram, time plot, and tabular data.
Information on this website is subject to change without notice.
