DI Water Particle Monitors

DI Water / UPW Particle Monitoring

Read below to learn about issues regarding monitoring particles in DI water (UPW). Also, see related products and available services.

Papers

Which Particle Counter is Best for You? Measurement of Ultrapure Water and Fluids (712.5 KB)

Compare particle counters and find the right one for your DI water application.

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New Particle Monitoring Strategies for DI Water in 300 mm Fabs (249.6 KB)

This paper examines the opportunities to improve performance, track data trends, and reduce cost by using a combination of high sensitivity particle counters and less expensive, lower sensitivity (0.1 microns) particle counters with very high sample volumes. We detail the impact of size sensitivity, sample volume, and zero count level on particle counter performance. Practical monitoring considerations and particle distribution differences between poorly filtered and highly filtered systems are also covered.

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Particle Counters for DI Water Systems (170.3 KB)

Find the right particle counter for your DI water system.

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Particle Counting Statistics in DI Water (178.3 KB)

There are three major determinates of the statistical performance of a particle counter. Read this paper to learn more.

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Basic Guide to Particle Counters and Particle Monitoring (441.3 KB)

This overview of particle counting starts by discussing sources of particles and particle monitoring technologies available, and continues by discussing various particle counter...

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Products

DI water particle counter: Ultra DI 50

Ultra DI® liquid particle counters are designed specifically for (deionized) DI water systems and will count and size contaminants as small as 0.05 microns (50 nano). The Ultra DI's large sample volume, low zero count, and high counting efficiency provide unsurpassed performance.

The Liquistat® liquid particle counter uses volumetric sampling for high precision particle analysis. The patented "Inviscid Jet" technology is a unique optical design providing superior sensitivity. The Liquistat Particle Counter eliminates background noise caused by the scattering of a laser light on a sample cell window by injecting the sample into a windowless cavity and sampling only in this region.

The HSLIS e-series liquid particle counter provides continuous real-time monitoring of particle contamination levels in DI water and process chemicals. The combination of high sensitivity and low cost make it ideal when large numbers of sensors are required. They provide sizing sensitivity down to 0.05 microns (50 nano) in DI water.

Services

Without Measurement There Is No Control
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