ITRS Roadmap Solutions

Optimized Molecular Contamination Monitoring for Lithography (305.2 KB)

Recent technical advances have made it feasible to perform continuous real-time monitoring with significant advances in sensitivity and stability while minimizing sample tubing effects. These improvements are realized by using...

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New Particle Monitoring Strategies for DI Water in 300 mm Fabs (249.6 KB)

This paper examines the opportunities in DI water particle monitoring to improve performance, track data trends, and reduce cost by using a combination of high sensitivity particle counters and less expensive, lower sensitivity (0.1 microns) particle counters with very high sample volumes. We detail the impact of size sensitivity, sample volume, and zero count level on DI water particle counter performance. Practical monitoring considerations and particle distribution differences between poorly filtered and highly filtered DI water systems are also covered.

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Particle Monitoring in Ultra Pure Water for Microelectronic Applications (1.7 MB)

View this presentation to learn why particle monitoring is critical, how to choose a particle counter, and how to interpret the data provided by the particle counter.

AMC Monitoring with IMS (1.5 MB)

Learn about the Ion Mobility Spectroscopy (IMS)technology for Airborne Molecular Contamination (AMC) monitoring.