As the leader in particle and molecular contamination monitoring, we have the products to help you meet the latest ITRS Roadmap requirements.
Download our papers to further educate you on contamination monitoring, or learn about contamination monitors.
Contact us if you need more information or have questions.
|
Optimized Molecular Contamination Monitoring for Lithography (305.2 KB) Recent technical advances have made it feasible to perform continuous real-time monitoring with significant advances in sensitivity and stability while minimizing sample tubing effects. These improvements are realized by using... Download above file for full tables and figures, or for overview, see HTML Version. |
| N E W |
Particle Monitoring in Ultra Pure Water for Microelectronic Applications (1.7 MB) View this presentation to learn why particle monitoring is critical, how to choose a particle counter, and how to interpret the data provided by the particle counter. |
|
AMC Monitoring with IMS (1.5 MB) Learn about the Ion Mobility Spectroscopy (IMS)technology for Airborne Molecular Contamination (AMC) monitoring. |
Laser Particle Counter: Ultra DI®This particle counters has a large sample volume, low zero count, and high counting efficiency |
Sensitivity
|
Sample Volume
|
Zero Count
|
| N E W |
Point-of-Use Ion Mobility Spectrometer: AirSentry® II
|
Information on this website is subject to change without notice.