Point-of-Use Ion Mobility Spectrometer: AirSentry® II
The AirSentry II is the winner of the 2008 Editors' Choice Best Product Awards, annually awarded by Semiconductor International.
Particle Measuring Systems' newest Airborne Molecular Contamination (AMC) monitor, the AirSentry® II, was designed with performance in mind. The new Ion Mobility Spectrometry (IMS) cell provides ppt sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis.
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Download the AirSentry II AMC Monitoring System Spec Sheet spec sheet... (448.3 KB)
Download the AirSentry II Chlorides spec sheet... (282.1 KB)
Download the AirSentry II spec sheet... (230.7 KB)
- Continuous monitoring of a critical point-of-use location
- Single external Calibration Station ensures analyzer to analyzer matching
- Robust and reliable data acquisition, control, and analysis
- No moving parts
- Infrequent maintenance
- Exposure optics - hazing and lens warranty data
- Reticle stage - reticle hazing
- Resist track - dispense/develop contamination (t-topping)
- Reticle inspection tool and stockers - storage contamination
- Ambient cleanroom monitoring - baseline contamination
- Make-up and recirculated air analysis - contamination
Download this Presentation: Real-time, Continuous, Point-of-use AMC monitor: AirSentry II (353.3 KB)
Reducing Capitol Labor Using AMC Monitoring (222.4 KB)
Organic Acid Detection with AirSentry II AMC (217.5 KB)
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Learn more about our microcontamination monitoring services.
AirSentry® is a registered trademark of Particle Measuring Systems.
Information on this website is subject to change without notice.
