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Point-of-Use Ion Mobility Spectrometer: AirSentry® II

The AirSentry II is the winner of the 2008 Editors' Choice Best Product Awards, annually awarded by Semiconductor International.

Particle Measuring Systems' newest Airborne Molecular Contamination (AMC) monitor, the AirSentry® II, was designed with performance in mind. The new Ion Mobility Spectrometry (IMS) cell provides ppt sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis.

Contact us for a quote or more information.

Molecular Contamination Monitor: AirSentry II

Download the AirSentry II Analyzer Spec Sheet... (230.7 KB)

Continuous monitoring of a critical point-of-use location
Single external Calibration Station ensures analyzer to analyzer matching
Robust and reliable data acquisition, control, and analysis
No moving parts
Infrequent maintenance

Exposure optics - hazing and lens warranty data
Reticle stage - reticle hazing
Resist track - dispense/develop contamination (t-topping)
Reticle inspection tool and stockers - storage contamination
Ambient cleanroom monitoring - baseline contamination
Make-up and recirculated air analysis - contamination

Contact us if you need more information or have questions.

Learn more about our microcontamination monitoring services.

AirSentry® is a registered trademark of Particle Measuring Systems.

Without Measurement There Is No Control

Information on this website is subject to change without notice.

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	Without Measurement There Is No Control Privacy content Copyright © 2002-2008 Particle Measuring Systems, Inc. Information on this website is subject to change without notice.