FAQ - AMC分子状ケミカル汚染対策について

質問 ＡＭＣとは何の略ですか？

回答

ＡＭＣとは、Airborne（気中）Molecular（分子状）Contamination（汚染）の略です。微粒子（パーティクル）ではないガス状の物質で、製造プロセス、プロセス環境で製品又は製品表面の特性に（化学的反応により）影響与え劣化させるケミカル汚染又は汚染物質がＡＭＣです。According to SEMI F21-95, AMC is broken into four categories: acids, bases, condensables, and dopants. Surface Molecular Contamination (SMC) is the result of gas phase molecules (AMC) interacting with critical surfaces to form very thin chemical films, often altering the physical, electrical, chemical, and optical properties of the surface. "Acidic gas contamination is particularly insidious because of its reactivity with a number of other chemical species." This often occurs on surfaces that are very sensitive to contamination such as semiconductor wafers, optical components within photolithography process tools, read-write heads, and magnetic coated disks in hard disk drives. Acidic AMC includes but isn't limited to SO2, HF, HCl, Cl2, NO, and NO2.

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