Molecular Contamination
The Molecular division of Particle Measuring Systems focuses on monitoring for airborne and surface molecular contamination (AMC and SMC). As the pioneers of real-time monitoring in the semiconductor industry, we have the resources and expertise to successfully quantify contaminants, identify sources and trends, and troubleshoot problems. We have a complete offering of molecular services to choose from, based upon your needs.
Site Survey
- Analysis of acids in air
- Analysis of ammonia and amines in air
- Analysis of organic compounds in air (hydrocarbons, siloxanes, NMP, etc)
- Analysis of surface condensables and trace metals
Process Characterization
- Real-time AMC monitoring
- Real-time SMC monitoring
- Process gas, CDA, or filter efficiency monitoring
- Outgas testing of FOUPs, reticle pods, etc
Troubleshooting
- Expert troubleshooting identifies problems quickly and thoroughly
- Identify contaminating species and events (sources)
- Quantify AMC and SMC levels by location and time
- Chemical filter post-mortem analysis
Product Validation
- Validate and establish confidence in accuracy and functionality of analyzers
- Test methods and techniques are shared and agreed upon with customer before service
Download our Molecular Contamination Services brochure (178.3 KB)
Soumettre une demande d'entretien auprès de Particle Measuring Systems
For addional information regarding our molecular contamination services, contact:
Rebecca Mullin
services@pmeasuring.com
Phone: (303) 443-7100 ext. 253
Toll-Free: (800) 238-1801
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