Detect Contamination Before It Damages Your Lens
Transmission loss, image distortion, decreased throughput, and costly maintenance all result from the preventable condition of optical hazing. In order to prevent this from occurring, the first step is to detect and monitor the contaminants that cause these effects. Real-time analyzers monitor for acids, bases, and condensable organics in a single system at detection levels below 193 nm lithography requirements.
See below for papers and products to help you avoid optical hazing.
Document : Spectrométrie à mobilité ionique (IMS) - Théorie et applicationsIon Mobility Spectrometry (IMS) Theory and Applications (866.6 KB) Download above file for full tables and figures, or for overview, see HTML Version. |
Surveillance AMC avec IMSAMC Monitoring with IMS (1.5 MB) Pour en savoir plus sur la technologie de surveillance AMC. |
Webémission : tirez tous les avantages de la lithographie à immersion |
Molecular Contamination |
Options de location / crédit-bail de compteur de particulesIf you need a particle counter or molecular contamination monitor for a short-term project or troubleshooting, we offer a comprehensive rental program. |
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