Spectromètre à mobilité ionique au point d'utilisation : AirSentry II
Particle Measuring Systems' newest Airborne Molecular Contamination (AMC) monitor, the AirSentry® II, was designed with performance in mind. The new Ion Mobility Spectrometry (IMS) cell provides ppt sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis.
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AirSentry II Analyzer (230.7 KB)
AVANTAGES
- Continuous monitoring of a critical point-of-use location
- Single external Calibration Station ensures analyzer to analyzer matching
- Robust and reliable data acquisition, control, and analysis
- No moving parts
- Infrequent maintenance
APPLICATIONS
- Exposure optics - hazing and lens warranty data
- Reticle stage - reticle hazing
- Resist track - dispense/develop contamination (t-topping)
- Reticle inspection tool and stockers - storage contamination
- Ambient cleanroom monitoring - baseline contamination
- Make-up and recirculated air analysis - contamination
LINKS TO MORE INFORMATION:
- In AMC Monitoring, Simple Designs Go A Long Way
- Ion Mobility Spectrometry (IMS) Theory and Applications
- Optimized Molecular Contamination Monitoring for Lithography
Contact us if you need more information or have questions.
Learn more about our microcontamination monitoring services.
AirSentry® is a registered trademark of Particle Measuring Systems.
© 2002-2008 Particle Measuring Systems, Inc.
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