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Learn efficient troubleshooting techniques for Airborne Molecular Contamination monitoring

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The AirSentry II family of ion mobility spectrometers for airborne molecular contamination (AMC) detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species. With parts-per-trillion (ppt) sensitivity, these point-of-use sensors provide fast response, increased detection selectivity and repeatable performance. Combining Air Sentry II sensors with a central software platform allows for easy data acquisition and analysis. The AirSentry II family of airborne molecular contamination sensors provide continuous actionable data, to enable efficient response to contamination sources and events.

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Features

  • High-sensitivity detection of acids and bases (acids, amines, ammonia and chlorides)
  • Versatile product configuration for point-of-use, multi-point and mobile airborne molecular contamination monitoring applications
  • Compact size allows placement in any location
  • Ethernet, RS-232, 4-20 mA outputs

Benefits

  • Continuous airoborne molecular contamination (AMC) monitoring of critical locations
  • Robust and reliable data acquisition, control and analysis
  • Long-term data stability
  • Lowest cost-per-test

Applications

  • Real-time corrosion monitoring within etch process locations
  • Real-time amine and ammonia monitoring within critical lithography systems
  • Quantification of chemical filter efficiency
  • Tracking and troubleshooting of airborne molecular contamination sources throughout cleanroom and in process tools
  • Analysis of airborne molecular contamination (AMC) within FOUP wafer storage modules

Available Accessories

AMC Vacuum Pump

AMC Vacuum Pump

Stand-alone electric pump that provides an adequate vacuum source for an AirSentry II POU sensor. Typically used when house vacuum is not available.

Facility Net Software

Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Related Products

AirSentry® II Mobile Airborne Molecular Contamination Detection System

Designed to enhance fixed Airborne Molecular Contamination (AMC) monitoring programs, the AirSentry II Mobile AMC Detection System is the first truly mobile system for monitoring airborne molecular contamination in cleanrooms. Mobility plays an important part in a strategic airborne molecular contamination monitoring program, allowing contamination sources to be quickly located, quantified and eliminated.

AirSentry® II Multi-point Airborne Molecular Contamination Monitoring System

The most advanced airborne molecular contamination (AMC) monitor available, utilizing sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. The system features a 16- or 30-point manifold sampling system and an on-board computer with secure software and communications.

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