Sensitivity range: S02: 0.2 - 2.0 µm, S03: 0.3 - 3.0 µm, S05: 0.5 - 20.0 µm

Particle Counting Spectrometer for Liquids

LiQuilaz® Liquid Particle Counter S Series

The LiQuilaz® optical liquid particle counters are volumetric monitors with a variety of sizing sensitivities as low as 0.2 µm. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (150 °C). Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.

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  • 0.3 -3.0 μm size range
  • 80 ± 10% ml/minflow rate
  • Compatible with a wide range of process chemicals
  • Small footprint for easy placement anywhere in the process
  • User-selected particle size threshold


  • Yield Improvement
  • Real-time characterization and analysis of particle contamination allows for immediate response to contamination
  • Volumetric measurements provide greater accuracy for tighter process control
  • Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help
  • Supports a wide range of applications and fluids
  • Works with compression or syringe samplers
  • Compatible with various tubing standards
  • In-line and batch sampling capabilities
  • RS-485 networking compatibility
  • Easy to Use
  • Small footprint for easy placement anywhere in the process
  • Flexible software provides numerous viewing options for real-time or retrieved data
  • User-selectable particle size thresholds


  • Effervescent chemical measurements using compression sampling
  • Chemical quality assurance
  • Process bath monitoring
  • DI water monitoring
  • Chemical delivery systems
  • Photoresist monitoring

Available Accessories

Facility Net Software

Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

Capillary Cleaning Kit

Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.

Communication Accessories

Communication Accessories

The LiQuilaz Particle Counter communicates via RS-485 protocol, so communication accessories are required.Depending on the configuration, you may need two cables and a BB485 converter. If the LiQuilaz instruments are daisy-chained (i.e. connected in series), a standard nine-pin serial cable can connect the two instruments.If the computer does not have a nine-pin serial port, a USB-to-serial converter is also required.

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