Molecular Contamination

The Molecular division of Particle Measuring Systems focuses on monitoring for airborne and surface molecular contamination (AMC and SMC). As the pioneers of real-time monitoring in the semiconductor industry, we have the resources and expertise to successfully quantify contaminants, identify sources and trends, and troubleshoot problems. We have a complete offering of molecular services to choose from, based upon your needs.

Site Survey

• Analysis of acids in air
• Analysis of ammonia and amines in air
• Analysis of organic compounds in air (hydrocarbons, siloxanes, NMP, etc)
• Analysis of surface condensables and trace metals

Process Characterization

• Real-time AMC monitoring
• Real-time SMC monitoring
• Process gas, CDA, or filter efficiency monitoring
• Outgas testing of FOUPs, reticle pods, etc

Troubleshooting

• Expert troubleshooting identifies problems quickly and thoroughly
• Identify contaminating species and events (sources)
• Quantify AMC and SMC levels by location and time
• Chemical filter post-mortem analysis

Product Validation

• Validate and establish confidence in accuracy and functionality of analyzers
• Test methods and techniques are shared and agreed upon with customer before service

Download our Molecular Contamination Services brochure

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For addional information regarding our lab testing services, contact:
services@pmeasuring.com
Toll-Free: (800) 238-1801