HSLIS M65 UL1604 COMPATIBLE PARTICLE COUNTERS

HSLIS M65 UL1604 compatible particle counters allow continuous, real-time monitoring of fluid particle contamination levels in Class I, Div II environments. Reduce costs with particle counters that can be installed without modification into these critical monitoring areas. Sizing sensitivity of 0.065 µm. Easily integrates into Facility Net software to provide an economical way to monitor multiple flow systems.

Download the HSLIS M65 UL1604 particle counter specification sheet (263.0 KB)

Vantagens
  • Cost Effective
  • Packaged for easy installation into Class I, Div II environments
  • Particle measurements for solvents, chemicals, and DI water
  • Simplify data analysis by using the same sensor throughout all of your fabs
  • Low initial capital investment because packaging has already been completed
  • Sealed package protects sensor from accidental chemical spills
Aplicações
  • Qualify particle concentrations in flammable solvents
  • Monitor chemical delivery systems
  • In-line measurements in recirculating baths
  • Quality assurance
  • Continuous monitoring for process improvement
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