Minienvironment Particle Sensor: MiniNet
Benefits of Using the MiniNet Particle Sensor
With the MiniNet particle counter, Particle Measuring Systems has developed the first process monitor designed specifically for detecting the presence and causes of particle events in minienvironments.
Through the use of ensemble (i.e. simultaneous, multi-point) sampling, the MiniNet increases the odds of detecting a harmful particle event almost seven-fold. Once you've observed an event, the built-in differential air pressure reading helps you identify the particle source more rapidly.
MiniNet takes less space and is easier to install than equivalent stand-along particle monitors. It is available with or without pump, and can be mounted either inside or outside the minienvironment. Two additional 4-20 mA sensors (such as AFV, TRH, CAP or ESA) can be added. Data collection and analysis are simplified as data from all sensors are transmitted to the Facility Net data management system via a single Ethernet output.
Folha de Especificação MiniNet (335.4 KB)
Benefits
Reduce Defects
- Ensemble sampling detects particles throughout the minienvironment, not just at a single sample point
- Real-time monitoring of defect-causing particles
- Detect breakdown in minienvironment protection
- Alarms allow users to respond immediately to particle or other events
Increase Productivity
- Interfaces with Facility Net software for comprehensive management of minienvironment
- Easy to configure and support with Facility Net
- Differential Air Pressure (DAP) measurements speed detection of particle source
- Simplifies IT tasks, reducing support requirements
- Simple tool integration
- Improves overall minienvironment reliability through monitoring potential failure points
Cost-Effective
- Complete particle monitoring solution integrated in a single, compact package
- Requires significantly less room than non-integrated systems
- Integrates multiple sensors into one package, one data output
- Control by facility data management system
- Reduces installation times and expenses
- Easy to clean; designed to minimize particle traps
- Diode laser reduces maintenance
- Ensemble sample provides widest coverage and greatest protection, eliminating need for multiple particle sensors per tool
- Install either within or outside of minienvironment
For more information, please see the following:
- Why is it Important to Monitor Minienvironments?
- What is MiniNet? How does it work?
- What data support use of the MiniNet in 300 mm fabs?
- Back to the Main MiniNet page
This instrument is CE certified.
MiniNet® is a registered trademark of Particle Measuring Systems.
Patents and applications apply - US 6615679; UK 2382139, foreign patents pending.
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