Optical Haze Blurs the Bottom Line

Detect Contamination Before It Damages Your Lens

Transmission loss, image distortion, decreased throughput, and costly maintenance all result from the preventable condition of optical hazing. In order to prevent this from occurring, the first step is to detect and monitor the contaminants that cause these effects. Real-time analyzers monitor for acids, bases, and condensable organics in a single system at detection levels below 193 nm lithography requirements.

See below for papers and products to help you avoid optical hazing.