AirSentry-IMS System
Real-time monitoring of airborne molecular contamination is critically important in semiconductor processing, hard disk drive, and TFT-LCD manufacturing. The AirSentry-IMS System meets the industry requirements of rapid detection and alarm, sub-ppb level sensitivity and concentration monitoring, wide area sampling, and speciation of many different gases.
Vantagens
- Real-time ppt level concentration monitoring for specific compounds
- Wide area sampling with multipoint sampling system
- Long life span for cost effectiveness
- Semi-automatic calibration for operation and maintenance ease
- Data-logging and historical trending for maximum data analysis
Aplicações
- Semiconductor
- DUV lithography
- Photomask
- Hard Disk Drive
- Flat Panel Display (TFT-LCD)
Request more information for your specific application
AirSentry-IMS System Brochure (323.7 KB)
This instrument is CE certified.
AiSentry-IMS® is a registered trademark of Particle Measuring Systems.
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