MOLECULAR CONTAMINATION MONITORING PRODUCTS
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AirSentry II AMC Monitor
The AirSentry II is a low-cost continuous AMC monitor with detection limits down to 70 ppt. This best-in-class detection limit from a real-time analyzer allows for short-term event monitoring and for long-term AMC trends needed in the most critical clean environments. Continue to learn more... |
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AiM 200 Surface Molecular Contamination (SMC) Monitor
The AiM 200 uses Surface Acoustic Wave (SAW) technology to monitor SMC. A high frequency, temperature controlled SAW sensor detects miniscule changes in mass on critical surfaces caused by interaction of organic and inorganic contaminants.
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WEBCAST: ITRS ROADMAP
PAPERS
Our online library of papers, written by our in-house experts, is a quick way for you to learn about contamination monitoring. Be sure to review it to find support for your application.
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Optimized AMC Monitoring for Lithography
Dedicated molecular contamination monitors, based on ion mobility spectroscopy (IMS), can detect NH3 and SO2 contamination events in real time as well as provide ppt level trends through long term averaging. ... Learn more...
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PRESENTATIONS
Our upcoming molecular presentations include:
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Continuous Monitoring of Molecular Contamination to Prevent Mask Hazing
Recent technical advances have made it feasible to perform continuous real-time monitoring of mask storage and exposure environments with significant advances in sensitivity and stability. These improvements are realized by using a small, low-cost monitor dedicated to continuously monitoring a single, critical location. Dan Rodier of Particle Measuring Systems will be presenting this paper at Photomask Japan 2008 on Friday, April 18th.
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Part-Per-Trillion AMC Detection
A new Ion Mobility Spectrometer has been released with the capability to provide real-time monitoring at part-per-trillion concentrations, of exposure tools, air handlers, and production cleanrooms at these critical point-of-use locations. Steven Rowley of Particle Measuring Systems will be presenting at Advanced Lithography. Plan to attend this presentation and visit us at Booth 206. |
SYSTEM SUPPORT
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What do you do when you don't know what to do? Call Particle Measuring Systems!
We have three levels of System Support packages to meet the requirements of our diversified customer base. Our System Support staff is ready to answer your questions regarding our Facility Monitoring Software and the instruments that can connect to it, as well as our batch sampling software. Don't waste your valuable time trying to find solutions when our experts can quickly assist you. If you would like details regarding the different plans and how to join, please contact our Inside Sales Group at 303.443.7100.
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SITE SURVEY TESTING SERVICES SAVES VALUABLE TIME
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Do you regularly take impinger or adsorbent tube samples to determine the levels of airborne molecular contaminants (AMC) in the cleanroom? Are you installing new 193 nm photolithography tools into your fab? The labor and laboratory costs in both of these cases can be significant. Instead, you can have the AirSentry Surveyor do the work for you. The only operator requirements to start sampling are to plug the Surveyor in and push a button. Free up your experts to resolve the real problems in the fab.
Specific acids, bases, and condensables are captured and reported to ppt levels, allowing you to have the data needed to make smart monitoring choices. Please contact us to see an example of a recent report.
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FREQUENTLY ASKED QUESTIONS
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Our experts are available to answer your questions. Submit your question and our experts will respond directly to you. You can also read our library of FAQs to help with your application.
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CONTACT INFORMATION
Please contact me if you have any questions.
Ed Terrell
Particle Measuring Systems
(303) 944-9293
eterrell@pmeasuring.com
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Particle Measuring Systems is the global leader in microcontamination monitoring, with 35 years experience developing and manufacturing particle counters.
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